• Si₃N₄ + Si (Silicon Nitride Film on Silicon Wafer)
  • Si₃N₄ + Si (Silicon Nitride Film on Silicon Wafer)

Silicon Nitride Wafer

Silicon nitride wafers (Si3N4/Si) are silicon wafers coated with a layer of silicon nitride (Si3N4). This layer offers excellent dielectric strength, chemical resistance, and mechanical hardness, making it suitable for various applications such as semiconductor devices, MEMS, and optical devices.

For inquiry, please give us the following information:

  1. Size with tolerance (Diameter /Si3N4 layer Thickness/ Thickness)
  2. Type (N or P)
  3. Orientation
  4. Primary flat
  5. Electrical resistivity
  6. Polishing Side (SSP or DSP )
  7. Quantity

Specifications

Diameter 4 inch (100mm)
Si3N4 Film Layer Thickness 100nm, 200nm, 300nm, or thicker upon request
Layer process Method LPCVD
Si wafer thickness 375um / 500um / 200 um
Electrical Resistivity <0.05Ω

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