Two heads
Touch screen operation panel
Main coater unit
SD-650MH/MHT
Two head
Touch panel operation screen
SD-650MH/MHT
SD-650MH (single head) and SD-650MHT(multi heads) are suitable for material sciences. It can be use for thin film deposition of various materials (i.e. metals, dielectrics, ceramics). It can achieve high vacuum condition and provide the suitable condition for magnetron sputtering in a very short period of time. It is highly customizable according to your needs;
- Number of head: 1 – 3
- Power supply – DC, RF, or DC+RF
- Stage rotation – Horizontal (default), Tilted, Planetary
- Thickness monitor (optional)
The package includes vacuum pumps and a chiller unit.
CE Certified
Fully compliant with EU Machinery Directive 2006/42/EC, ensuring safe operation for research and industrial use across the EU. (EN ISO 12100 risk assessment, EN 60204-1 electrical safety)
