Palladium Sputtering Target
Palladium (Pd) is a platinum-group metal valued for its excellent catalytic activity, corrosion resistance, and unique ability to absorb large volumes of hydrogen gas. With the lowest melting point and density among the platinum-group metals, palladium offers an attractive balance of performance and processability for thin-film applications.
Sputtered palladium films are widely used in semiconductor and electronics manufacturing, including conductive layers, connectors, and multilayer ceramic capacitor electrodes. Palladium coatings also play a key role in hydrogen sensors and purification membranes, as well as catalytic thin-film systems for automotive and industrial applications.
| Name | Palladium |
| Symbol | Pd |
| Melting point | 1555°C |
| Density | 12.02 g/cm3 |
| Purity | 99.95% (3N5) / higher grades available on request |
| Shape | Disc, Plate |