Aluminium-Silicon-Chromium Sputtering Target
Aluminium-silicon-chromium (AlSiCr) belongs to the family of silicon-chromium resistor alloys, in which aluminium is added to a silicon-rich Cr-Si base to help tailor the temperature coefficient of resistance (TCR). This family of materials is used to sputter thin films with high sheet resistance and stable, predictable resistance behaviour over temperature.
Sputtered Al-Si-Cr type films are studied and used to fabricate precision thin-film resistors for integrated circuits and hybrid microelectronics, where a low, stable temperature coefficient of resistance is required for accurate, repeatable resistor performance.
| Name | Aluminium-Silicon-Chromium alloy |
| Composition | Available on request (Si-rich Cr-Si base with minor Al addition for TCR tuning) |
| Purity | 99.5% |
| Shape | Disc, Plate |