Nickel-Chromium-Silicon Sputtering Target
Nickel-chromium-silicon (NiCrSi) adds silicon to the well-known NiCr resistor alloy system. Because chromium has a positive temperature coefficient of resistance (TCR) and silicon has a negative one, combining the two allows the TCR of the sputtered film to be tuned close to zero for a given composition.
Sputtered NiCrSi thin films are used to fabricate precision thin-film resistors for integrated circuits and hybrid microelectronics, where a low, stable temperature coefficient of resistance combined with high sheet resistance is required for accurate, repeatable resistor performance.
| Name | Nickel-Chromium-Silicon alloy |
| Composition | Ni55Cr40Si5 wt% (or as requested) |
| Purity | 99.9% |
| Shape | Disc, Plate |