SD-650MH/MHT

SD-650MH (single head) and SD-650MHT(multi heads) are suitable for material sciences. It can be use for thin film deposition of various materials (i.e. metals, dielectrics, ceramics). It can achieve high vacuum condition and provide the suitable condition for magnetron sputtering in a very short period of time. It is highly customizable according to your needs;

• Number of head: 1 – 3
• Power supply – DC, RF, or DC+RF
• Stage rotation – Horizontal (default), Tilted, Planetary
• Thickness monitor (optional)

The package includes vacuum pumps and a chiller unit.