Two heads
Touch screen operation panel
SD-650MH/MHT High Vacuum Thin Film Sputtering System
SD-650MH (single head) and SD-650MHT (multi heads) are high vacuum thin film sputtering systems for materials science. It can be used for thin film deposition of various materials (e.g. metals, dielectrics, ceramics). It can achieve high vacuum condition and provide the suitable condition for magnetron sputtering in a very short period of time. It is highly customizable according to your needs;
- Number of head: 1 – 3
- Power supply – DC, RF, or DC+RF
- Stage rotation – Horizontal (default), Tilted, Planetary
- Thickness monitor (optional)
The package includes vacuum pumps and a chiller unit.
Key Features
High vacuum pumping: Rotary pump combined with an oil-free turbomolecular pump (300 L/s).
Versatile thin film deposition: Deposits metals, dielectrics and ceramics with DC, RF or DC+RF power.
Water-cooled target: Sputtering target is water-cooled; chiller unit included.
Precise gas control: Gas flow controller for stable process pressure of 0.5–5 Pa.
Metal chamber: Ø260 × 200 mm metal vacuum chamber.
Technical Specifications
| Model | SD-650MH/MHT High Vacuum Magnetron Ion Sputtering Coater |
|---|---|
| Sputtering power | DC, RF or DC+RF |
| Target size | Ø50 × 3 mm (Cu) |
| Target materials | Weakly magnetic materials |
| Vacuum pumps | Rotary vane pump (oil) + turbomolecular pump (oil-free) |
| Rotary pumping speed | 16 m³/h at 50 Hz / 19.2 m³/h at 60 Hz |
| Turbomolecular pumping speed | 300 L/s |
| Vacuum limit | 5 × 10-5 Pa |
| Working pressure | 0.5–5 Pa |
| Pump-down time | < 10 min (to 10-3 Pa) |
| Vacuum measurement | Atmosphere to 10-6 Pa |
| Gas control | Gas flow controller |
| Chamber | Ø260 × 200 mm (H), metal |
| Cooling | Air cooling (pump), water cooling (sputtering target) |
| Power supply | AC 220 V 50 Hz or AC 110 V 60 Hz |
| Power consumption | < 3000 W |
| Dimensions (L × W × H) | 610 × 420 × 490 mm |
| Weight | 100 kg |
| Warranty | 1-year limited warranty with lifetime product support |
CE Certified
Fully compliant with EU Machinery Directive 2006/42/EC, ensuring safe operation for research and industrial use across the EU. (EN ISO 12100 risk assessment, EN 60204-1 electrical safety)
