AlN Aluminum Nitride

Aluminum Nitride Sputtering Target

Aluminum nitride (AlN) sputtering targets are highly valued for their outstanding thermal conductivity and superior electrical insulation properties, making them essential in advanced thin-film deposition processes. Sputtered AlN films are widely utilized in high-performance electronic and power devices, where efficient heat dissipation and electrical isolation are crucial for reliability and efficiency.

These films enable excellent thermal management in high-frequency and high-power electronics, such as RF components, LED devices, and power modules. Additionally, AlN thin films are transparent in the ultraviolet range, enhancing their suitability for optoelectronic applications, including UV sensors and UV light-emitting devices. The remarkable thermal stability of AlN films further supports their use in harsh operating conditions, where durability and performance are paramount.

Name Aluminum Nitride sputtering target
Symbol AlN
Colour White
Purity 99.5%
Melting Point 2,200℃
Density 3.26 g/cm3
Shape Disc, Planar

For inquiry, please give us the following information:

  1. Size with tolerance or Drawing
  2. Shape
  3. Purity
  4. Quantity

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