Calcium Ruthenium Oxide Sputtering Target

Calcium ruthenate (CaRuO₃) sputtering targets are valued for their metallic conductivity and unique electronic properties, including strong spin-orbit coupling. Sputtered CaRuO₃ films demonstrate excellent thermal and chemical stability, making them ideal for use as conductive layers in thin-film devices.

These films are also integral to the development of oxide heterostructures and are being actively explored for spintronic applications, where the interplay between electronic and magnetic properties is critical. Furthermore, CaRuO₃’s compatibility with complex oxide systems broadens its utility in advanced electronic and optoelectronic devices, enabling innovative approaches to device fabrication.

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