Cerium Oxide Sputtering Target

Cerium dioxide (CeO₂) sputtering targets are highly regarded for their excellent thermal stability, oxygen storage capacity, and mechanical strength. Sputtered CeO₂ films are extensively used in catalysis, where they function as effective support materials for catalytic reactions, particularly in automotive and industrial applications.

In solid oxide fuel cells (SOFCs), CeO₂ films serve as efficient electrolyte materials due to their ionic conductivity and stability at high temperatures. Their optical transparency and durability also make them ideal for optical coatings and sensors. Furthermore, CeO₂’s high dielectric constant and resistance to degradation under processing conditions enable its use as a reliable dielectric material in advanced semiconductor manufacturing.

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