Ruthenium Sputtering Target
Ruthenium is a transition metal known for its high hardness and resistance to wear. As a sputtering target, ruthenium is used to create thin films for electronic components such as resistors and memory devices.
Its ability to form compounds with other metals enhances its role in catalysis and as a dopant in semiconductors. Ruthenium sputtering targets are also essential in the production of advanced materials for microelectronics.
Name | Ruthenium |
Symbol | Ru |
Melting point | 2,334°C |
Density | 12.1 g/cm3 |
Purity | 99.95% |
Shape | Disc, Planar |