Titanium-Zinc Sputtering Target

Titanium-zinc (TiZn) combines the light weight and reactivity of titanium with zinc’s well-characterised behaviour as a wide-bandgap semiconductor host in thin-film form.

Titanium-doped zinc oxide (TZO) is an established transparent conducting oxide studied as a lower-cost alternative to indium tin oxide (ITO). However, published TZO research most commonly uses a ceramic TiO2-doped ZnO sputtering target rather than a metallic Ti-Zn alloy target reactively sputtered in oxygen. Sputtered metallic TiZn thin films are therefore of research interest for exploring this reactive-sputtering route to titanium-doped zinc oxide coatings.

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