SD-900M Magnetron Ion sputtering coater

SD-900C 2-in-1 Sputter and Carbon Coater for SEM

SD-900C is a 2-in-1 sputter and carbon coater with two units: a magnetron ion sputtering unit and a thermal evaporation carbon unit. The magnetron ion sputtering unit is widely used to coat non-conductive SEM samples with gold, silver or platinum for better imaging. It is also excellent for surface treatment. The thermal evaporation carbon unit applies thin conductive carbon film on a sample surface. Applying this coating is an effective preparation technique for diminishing charge-up electron artifacts for analysis in a SEM. It can quickly reach its working vacuum within 5 minutes with a proper vacuum pump. It’s user friendly and easy to operate. The package includes a vacuum pump while a chiller is optional for the magnetron ion sputtering unit. Thickness monitor is available as an option.

Key Features

Two coating methods in one system: Magnetron sputtering for metal coating and thermal evaporation for carbon coating.

Au, Ag and Pt targets: The sputtering unit accepts Ø50 mm gold, silver or platinum targets.

Carbon rope evaporation: The evaporation unit deposits a thin conductive carbon film that reduces charging in SEM.

Fast pump-down: Reaches the 2 Pa vacuum limit in under 5 minutes.

Space-saving stacked design: The two units stack on top of each other; each unit measures 360 × 300 × 380 mm.

User-friendly operation: Simple front-panel controls on both units.

Technical Specifications

Model SD-900C Magnetron Ion Sputtering + Thermal Evaporation Carbon Coater
Sputtering target size Ø50 × 0.1 mm (Au)
Sputtering target materials Au, Ag, Pt
Evaporation source Carbon rope
Max sputtering current 100 mA
Max evaporation current 100 A
Sputtering working pressure 8–20 Pa
Evaporation working pressure 4–6 Pa
Vacuum limit 2 Pa
Pump-down time < 5 min (to 2 Pa)
Vacuum measurement Atmosphere to 2 × 10-2 mbar
Gas control Gas flow controller
Chamber Ø150 × 120 mm (H), scratch-resistant quartz glass
Vacuum pump Rotary vane pump (oil), 8 m³/h at 50 Hz / 9.6 m³/h at 60 Hz
Cooling Air cooling (evaporation unit), water cooling (sputtering unit, optional chiller)
Power supply AC 220 V 50 Hz or AC 110 V 60 Hz
Power consumption < 2000 W
Dimensions per unit (L × W × H) 360 × 300 × 380 mm
Weight (2 units) 55 kg
Warranty 1-year limited warranty with lifetime product support

CE Certified

Fully compliant with EU Machinery Directive 2006/42/EC, ensuring safe operation for research and industrial use across the EU. (EN ISO 12100 risk assessment, EN 60204-1 electrical safety)

CE mark

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